JPH0167753U - - Google Patents
Info
- Publication number
- JPH0167753U JPH0167753U JP1987161796U JP16179687U JPH0167753U JP H0167753 U JPH0167753 U JP H0167753U JP 1987161796 U JP1987161796 U JP 1987161796U JP 16179687 U JP16179687 U JP 16179687U JP H0167753 U JPH0167753 U JP H0167753U
- Authority
- JP
- Japan
- Prior art keywords
- suction cup
- wafer
- suction
- vacuums
- closes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987161796U JPH0167753U (en]) | 1987-10-22 | 1987-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987161796U JPH0167753U (en]) | 1987-10-22 | 1987-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0167753U true JPH0167753U (en]) | 1989-05-01 |
Family
ID=31445047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987161796U Pending JPH0167753U (en]) | 1987-10-22 | 1987-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0167753U (en]) |
-
1987
- 1987-10-22 JP JP1987161796U patent/JPH0167753U/ja active Pending